Abstract
The authors present a nonplanar surface profile measurement method wherein in-plane and out-of-plane coordinates are independently measured using two different techniques, and the data are correlated to give an overall surface profile. The first technique uses computer-controlled optical equipment to determine the in-plane grid locations in an x-y coordinate system. Moire interferometry is used to determine the out-of-plane depth to give the z-coordinates. The z data are then correlated with the x-y data to define the surface profile. The procedure used is described, along with some preliminary results.
Original language | English (US) |
---|---|
Pages | 533-535 |
Number of pages | 3 |
State | Published - Mar 1989 |
Externally published | Yes |
Event | Proceedings: the Twenty-First Southeastern Symposium on System Theory - Tallahassee, FL, USA Duration: Mar 26 1989 → Mar 28 1989 |
Other
Other | Proceedings: the Twenty-First Southeastern Symposium on System Theory |
---|---|
City | Tallahassee, FL, USA |
Period | 3/26/89 → 3/28/89 |
All Science Journal Classification (ASJC) codes
- Control and Systems Engineering
- General Mathematics