Non-planar surface profile measurements systems

N. Chandra, P. Schwindt

Research output: Contribution to conferencePaperpeer-review

Abstract

The authors present a nonplanar surface profile measurement method wherein in-plane and out-of-plane coordinates are independently measured using two different techniques, and the data are correlated to give an overall surface profile. The first technique uses computer-controlled optical equipment to determine the in-plane grid locations in an x-y coordinate system. Moire interferometry is used to determine the out-of-plane depth to give the z-coordinates. The z data are then correlated with the x-y data to define the surface profile. The procedure used is described, along with some preliminary results.

Original languageEnglish (US)
Pages533-535
Number of pages3
StatePublished - Mar 1 1989
Externally publishedYes
EventProceedings: the Twenty-First Southeastern Symposium on System Theory - Tallahassee, FL, USA
Duration: Mar 26 1989Mar 28 1989

Other

OtherProceedings: the Twenty-First Southeastern Symposium on System Theory
CityTallahassee, FL, USA
Period3/26/893/28/89

All Science Journal Classification (ASJC) codes

  • Control and Systems Engineering
  • Mathematics(all)

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