Novel MEMS fabry-perot interferometric pressure sensors

Ivan Padron, Anthony T. Fiory, Nuggehalli M. Ravindra

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Scopus citations

Abstract

A novel design for a Fabry-Perot Interferometric Sensor (FPIS) consisting of a Fabry-Perot cavity formed between two bonded surfaces is discussed. The Fabry-Perot cavity and the optical fiber to which it is coupled are used as the sensing element and interconnect, respectively. The Fabry-Perot cavity is fabricated using the Micro Electro Mechanical Systems (MEMS) technology. The introduction of a center rigid body diaphragm gives this sensor considerable advantage when compared with previous Fabry-Perot cavity based sensors.

Original languageEnglish (US)
Title of host publicationTHERMEC 2009
EditorsTara Chandra, Tara Chandra, Tara Chandra, N. Wanderka, N. Wanderka, N. Wanderka, Walter Reimers, Walter Reimers, Walter Reimers, M. Ionescu, M. Ionescu, M. Ionescu
PublisherTrans Tech Publications Ltd
Pages1009-1014
Number of pages6
ISBN (Print)0878492941, 9780878492947
DOIs
StatePublished - 2010
Event6th International Conference on Processing and Manufacturing of Advanced Materials - THERMEC'2009 - Berlin, Germany
Duration: Aug 25 2009Aug 29 2009

Publication series

NameMaterials Science Forum
Volume638-642
ISSN (Print)0255-5476
ISSN (Electronic)1662-9752

Other

Other6th International Conference on Processing and Manufacturing of Advanced Materials - THERMEC'2009
CountryGermany
CityBerlin
Period8/25/098/29/09

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

Keywords

  • Diaphragm based sensor
  • Embossed diaphragm
  • Fabry-Perot interferometry
  • Pressure sensor

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