@inproceedings{7038b711a9654795b74969dd9e5fdf7f,
title = "Novel MEMS fabry-perot interferometric pressure sensors",
abstract = "A novel design for a Fabry-Perot Interferometric Sensor (FPIS) consisting of a Fabry-Perot cavity formed between two bonded surfaces is discussed. The Fabry-Perot cavity and the optical fiber to which it is coupled are used as the sensing element and interconnect, respectively. The Fabry-Perot cavity is fabricated using the Micro Electro Mechanical Systems (MEMS) technology. The introduction of a center rigid body diaphragm gives this sensor considerable advantage when compared with previous Fabry-Perot cavity based sensors.",
keywords = "Diaphragm based sensor, Embossed diaphragm, Fabry-Perot interferometry, Pressure sensor",
author = "Ivan Padron and Fiory, {Anthony T.} and Ravindra, {Nuggehalli M.}",
year = "2010",
doi = "10.4028/www.scientific.net/MSF.638-642.1009",
language = "English (US)",
isbn = "0878492941",
series = "Materials Science Forum",
publisher = "Trans Tech Publications Ltd",
pages = "1009--1014",
editor = "Tara Chandra and Tara Chandra and Tara Chandra and N. Wanderka and N. Wanderka and N. Wanderka and Walter Reimers and Walter Reimers and Walter Reimers and M. Ionescu and M. Ionescu and M. Ionescu",
booktitle = "THERMEC 2009",
note = "6th International Conference on Processing and Manufacturing of Advanced Materials - THERMEC'2009 ; Conference date: 25-08-2009 Through 29-08-2009",
}