Optical and structural characterization of nanocrystalline silicon superlattices: Toward nanoscale silicon metrology

Stefan Zollner, Atul Konkar, Ran Liu, Himansu Yapa, Patricia F. Dryer, Victoria A. Neeley, Qianghua Xie, Galina F. Grom, Qingyuan Zhu, Rishikesh Krishnan, Philippe M. Fauchet, Leonid V. Tsybeskov

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Material Science