Optically assisted metal-induced crystallization of thin Si films for low-cost solar cells

Wei Chen, Bhushan Sopori, Kim Jones, Robert Reedy, N. M. Ravindra, Roger Aparacio, Robert Birkmire, Scott Morrison, Ken Coats, Arun Madan

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations

Abstract

Optically assisted, metal induced crystallization (MIC) was used to convert amorphous Si films, deposited on Al coated glass substrates, into polycrystalline Si (pc-Si). The study investigated the effects of deposition temperature, process temperature, and film thickness on the grain orientation, grain size, and crystallization front of the processed films. Furthermore, we have attempted to examine the role of Al in MIC - in particular, whether the metal can be confined to the interface while grain enhancement occurs.

Original languageEnglish (US)
Title of host publicationAdvanced Materials and Devices for Large-Area Electronics
PublisherMaterials Research Society
Pages41-46
Number of pages6
ISBN (Print)1558996214, 9781558996212
DOIs
StatePublished - 2001
Event2001 MRS Spring Meeting - San Francisco, CA, United States
Duration: Apr 16 2001Apr 20 2001

Publication series

NameMaterials Research Society Symposium Proceedings
Volume685
ISSN (Print)0272-9172

Other

Other2001 MRS Spring Meeting
Country/TerritoryUnited States
CitySan Francisco, CA
Period4/16/014/20/01

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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