Optimal Cyclic Scheduling of Wafer-Residency-Time-Constrained Dual-Arm Cluster Tools by Configuring Processing Modules and Robot Waiting Time

Jufeng Wang, Chunfeng Liu, Meng Chu Zhou, Tingting Leng, Aiiad Albeshri

Research output: Contribution to journal › Article › peer-review

7 Scopus citations

Fingerprint

Dive into the research topics of 'Optimal Cyclic Scheduling of Wafer-Residency-Time-Constrained Dual-Arm Cluster Tools by Configuring Processing Modules and Robot Waiting Time'. Together they form a unique fingerprint.

Keyphrases

Computer Science

Mathematics

Engineering