TY - GEN
T1 - Optimal one-wafer cyclic scheduling analysis of hybrid multi-cluster tools with one-space buffering module
AU - Yang, Fajun
AU - Wu, Nai Qi
AU - Qiao, Yan
AU - Zhou, Meng Chu
N1 - Publisher Copyright:
© 2014 IEEE.
PY - 2014/9/22
Y1 - 2014/9/22
N2 - A multi-cluster tool with both single and dual-arm individual cluster tools is called a hybrid multi-cluster tool. To operate it, one needs to coordinate different types of robots for accessing the shared buffering modules. Aiming at finding a one-wafer periodic schedule such that the lower bound of cycle time can be reached, this work studies its scheduling when its bottleneck individual tool is process-bound. With a timed Petri net model, the scheduling problem is reduced to determine the waiting time of robots. Then, the conditions are presented, under which a one-wafer periodic schedule exists such that the lower bound of cycle time can be reached. Based on them, an efficient algorithm is given to check whether such a one-wafer periodic schedule exists. If so, it is found via simple calculation. An example is given to show its effectiveness.
AB - A multi-cluster tool with both single and dual-arm individual cluster tools is called a hybrid multi-cluster tool. To operate it, one needs to coordinate different types of robots for accessing the shared buffering modules. Aiming at finding a one-wafer periodic schedule such that the lower bound of cycle time can be reached, this work studies its scheduling when its bottleneck individual tool is process-bound. With a timed Petri net model, the scheduling problem is reduced to determine the waiting time of robots. Then, the conditions are presented, under which a one-wafer periodic schedule exists such that the lower bound of cycle time can be reached. Based on them, an efficient algorithm is given to check whether such a one-wafer periodic schedule exists. If so, it is found via simple calculation. An example is given to show its effectiveness.
UR - http://www.scopus.com/inward/record.url?scp=84929162607&partnerID=8YFLogxK
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U2 - 10.1109/ICRA.2014.6907330
DO - 10.1109/ICRA.2014.6907330
M3 - Conference contribution
AN - SCOPUS:84929162607
T3 - Proceedings - IEEE International Conference on Robotics and Automation
SP - 3279
EP - 3284
BT - Proceedings - IEEE International Conference on Robotics and Automation
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 2014 IEEE International Conference on Robotics and Automation, ICRA 2014
Y2 - 31 May 2014 through 7 June 2014
ER -