Optimal one-wafer cyclic scheduling analysis of hybrid multi-cluster tools with one-space buffering module

Fajun Yang, Nai Qi Wu, Yan Qiao, Mengchu Zhou

Research output: Contribution to journalConference articlepeer-review

2 Scopus citations

Abstract

A multi-cluster tool with both single and dual-arm individual cluster tools is called a hybrid multi-cluster tool. To operate it, one needs to coordinate different types of robots for accessing the shared buffering modules. Aiming at finding a one-wafer periodic schedule such that the lower bound of cycle time can be reached, this work studies its scheduling when its bottleneck individual tool is process-bound. With a timed Petri net model, the scheduling problem is reduced to determine the waiting time of robots. Then, the conditions are presented, under which a one-wafer periodic schedule exists such that the lower bound of cycle time can be reached. Based on them, an efficient algorithm is given to check whether such a one-wafer periodic schedule exists. If so, it is found via simple calculation. An example is given to show its effectiveness.

Original languageEnglish (US)
Article number6907330
Pages (from-to)3279-3284
Number of pages6
JournalProceedings - IEEE International Conference on Robotics and Automation
DOIs
StatePublished - Jan 1 2014
Event2014 IEEE International Conference on Robotics and Automation, ICRA 2014 - Hong Kong, China
Duration: May 31 2014Jun 7 2014

All Science Journal Classification (ASJC) codes

  • Software
  • Control and Systems Engineering
  • Artificial Intelligence
  • Electrical and Electronic Engineering

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