Optimal one-wafer cyclic scheduling analysis of transport-dominant single-arm multi-cluster tools

Fajun Yang, Naiqi Wu, Liping Bai, Mengchu Zhou

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations

Abstract

In semiconductor manufacturing, it is very challenging to find an optimal one-wafer cyclic schedule for a multi-cluster tool. This work aims to do so. It assumes that its bottleneck tool is transport-bound, thereby making it transport-dominant. To do so, a scheduling strategy for each individual tool is determined. Then, a Petri net model is developed to describe the dynamic behavior of the system. With the model, it is found that to coordinate the robots is to determine their waiting time. Then, we derive necessary and sufficient conditions under which a one-wafer cyclic schedule with the lower bound of cycle time exists and present an efficient algorithm to test its existence and find it if existing. One industrial example is used to show the application and effectiveness of the proposed method.

Original languageEnglish (US)
Title of host publication2016 IEEE International Conference on Automation Science and Engineering, CASE 2016
PublisherIEEE Computer Society
Pages1405-1410
Number of pages6
ISBN (Electronic)9781509024094
DOIs
StatePublished - Nov 14 2016
Event2016 IEEE International Conference on Automation Science and Engineering, CASE 2016 - Fort Worth, United States
Duration: Aug 21 2016Aug 24 2016

Publication series

NameIEEE International Conference on Automation Science and Engineering
Volume2016-November
ISSN (Print)2161-8070
ISSN (Electronic)2161-8089

Other

Other2016 IEEE International Conference on Automation Science and Engineering, CASE 2016
CountryUnited States
CityFort Worth
Period8/21/168/24/16

All Science Journal Classification (ASJC) codes

  • Control and Systems Engineering
  • Electrical and Electronic Engineering

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