TY - GEN
T1 - Optimal one-wafer cyclic scheduling analysis of transport-dominant single-arm multi-cluster tools
AU - Yang, Fajun
AU - Wu, Naiqi
AU - Bai, Liping
AU - Zhou, Mengchu
N1 - Publisher Copyright:
© 2016 IEEE.
PY - 2016/11/14
Y1 - 2016/11/14
N2 - In semiconductor manufacturing, it is very challenging to find an optimal one-wafer cyclic schedule for a multi-cluster tool. This work aims to do so. It assumes that its bottleneck tool is transport-bound, thereby making it transport-dominant. To do so, a scheduling strategy for each individual tool is determined. Then, a Petri net model is developed to describe the dynamic behavior of the system. With the model, it is found that to coordinate the robots is to determine their waiting time. Then, we derive necessary and sufficient conditions under which a one-wafer cyclic schedule with the lower bound of cycle time exists and present an efficient algorithm to test its existence and find it if existing. One industrial example is used to show the application and effectiveness of the proposed method.
AB - In semiconductor manufacturing, it is very challenging to find an optimal one-wafer cyclic schedule for a multi-cluster tool. This work aims to do so. It assumes that its bottleneck tool is transport-bound, thereby making it transport-dominant. To do so, a scheduling strategy for each individual tool is determined. Then, a Petri net model is developed to describe the dynamic behavior of the system. With the model, it is found that to coordinate the robots is to determine their waiting time. Then, we derive necessary and sufficient conditions under which a one-wafer cyclic schedule with the lower bound of cycle time exists and present an efficient algorithm to test its existence and find it if existing. One industrial example is used to show the application and effectiveness of the proposed method.
UR - http://www.scopus.com/inward/record.url?scp=85001043475&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85001043475&partnerID=8YFLogxK
U2 - 10.1109/COASE.2016.7743574
DO - 10.1109/COASE.2016.7743574
M3 - Conference contribution
AN - SCOPUS:85001043475
T3 - IEEE International Conference on Automation Science and Engineering
SP - 1405
EP - 1410
BT - 2016 IEEE International Conference on Automation Science and Engineering, CASE 2016
PB - IEEE Computer Society
T2 - 2016 IEEE International Conference on Automation Science and Engineering, CASE 2016
Y2 - 21 August 2016 through 24 August 2016
ER -