Abstract
This work studies the scheduling problem of a single-arm multicluster tool with a linear topology and process-bound bottleneck individual tool. The objective is to find a one-wafer cyclic schedule such that the lower bound of cycle time is reached by optimally configuring spaces in buffering modules that link individual cluster tools. A Petri net (PN) model is developed to describe the dynamic behavior of the system by extending resource-oriented PNs such that a schedule can be parameterized by robots' waiting time. Based on this model, conditions are presented under which a one-wafer cyclic schedule with the lower bound of cycle time can be found. With the derived conditions, an algorithm is developed to find such a schedule and optimally configure buffer spaces. The algorithm requires only simple calculation to set the robots' waiting time and buffer size. Illustrative examples are presented to demonstrate the proposed method.
Original language | English (US) |
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Article number | 7372477 |
Pages (from-to) | 1456-1467 |
Number of pages | 12 |
Journal | IEEE Transactions on Systems, Man, and Cybernetics: Systems |
Volume | 46 |
Issue number | 10 |
DOIs | |
State | Published - Oct 2016 |
All Science Journal Classification (ASJC) codes
- Software
- Control and Systems Engineering
- Human-Computer Interaction
- Computer Science Applications
- Electrical and Electronic Engineering
Keywords
- Discrete event system
- Petri net (PN)
- multicluster tools
- resource-oriented Petri net
- scheduling
- semiconductor manufacturing