Optimal One-Wafer Cyclic Scheduling of Hybrid Multirobot Cluster Tools With Tree Topology

Fa Jun Yang, Nai Qi Wu, Yan Qiao, Meng Chu Zhou

Research output: Contribution to journalArticlepeer-review

15 Scopus citations


A hybrid multirobot cluster tool is composed of both single and dual-arm robotic cluster tools. Since the behavior of different individual tools is different, it is very challenging to coordinate their activities in such a tool and to schedule it optimally. To find a one-wafer cyclic schedule to reach the shortest cycle time for a treelike hybrid multirobot cluster tool whose bottleneck tool is process-bound, this paper extends resource-oriented Petri nets to model it such that a schedule can be parameterized by its robots' waiting time. Based on the model, this paper then establishes the conditions under which there is a one-wafer cyclic schedule such that the shortest cycle time can be obtained. An efficient algorithm is also given to test the existence of such a schedule and to find it if existing. At last, examples are used to illustrate the proposed approaches.

Original languageEnglish (US)
Article number7801948
Pages (from-to)289-298
Number of pages10
JournalIEEE Transactions on Systems, Man, and Cybernetics: Systems
Issue number2
StatePublished - Feb 2018

All Science Journal Classification (ASJC) codes

  • Software
  • Control and Systems Engineering
  • Human-Computer Interaction
  • Computer Science Applications
  • Electrical and Electronic Engineering


  • Hybrid multirobot cluster tool
  • Petri nets (PNs)
  • productivity
  • scheduling
  • semiconductor manufacturing


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