Optimal one-wafer cyclic scheduling of single-arm multicluster tools with two-space buffering modules

Fa Jun Yang, Nai Qi Wu, Yan Qiao, Meng Chu Zhou

Research output: Contribution to journalArticlepeer-review

24 Scopus citations

Abstract

A multi-cluster tool is composed of a number of individual cluster tools linked by buffering modules (BMs). The capacity of a BM can be one or two. Aiming at finding an optimal one-wafer cyclic schedule, this paper explores the effect of two-space BMs on the performance of a multi-cluster tool. A Petri net (PN) model is developed to model it by extending resource-oriented PNs. The dynamic behavior of robot waiting and tasks, process modules, and buffers is well described by the model. This paper shows that there is always a one-wafer cyclic schedule that reaches the lower bound of the cycle time of a process-bound tool. Furthermore, a closed-form algorithm is revealed to find such a schedule for the first time for such multi-cluster tools. Illustrative examples are given to show the application and power of the proposed method.

Original languageEnglish (US)
Article number2327051
Pages (from-to)1584-1597
Number of pages14
JournalIEEE Transactions on Systems, Man, and Cybernetics: Systems
Volume44
Issue number12
DOIs
StatePublished - Dec 1 2014

All Science Journal Classification (ASJC) codes

  • Software
  • Control and Systems Engineering
  • Human-Computer Interaction
  • Computer Science Applications
  • Electrical and Electronic Engineering

Keywords

  • Multi-cluster tools
  • Petri net (PN)
  • Scheduling
  • Semiconductor manufacturing

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