Optimal One-Wafer Cyclic Scheduling of Time-Constrained Hybrid Multicluster Tools via Petri Nets

Fa Jun Yang, Nai Qi Wu, Yan Qiao, Meng Chu Zhou

Research output: Contribution to journalArticlepeer-review

14 Scopus citations

Abstract

Scheduling a multicluster tool with wafer residency time constraints is highly challenging yet important in ensuring high productivity of wafer fabrication. This paper presents a method to find an optimal one-wafer cyclic schedule for it. A Petri net is developed to model the dynamic behavior of the tool. By this model, a schedule of the system is analytically expressed as a function of robots' waiting time. Based on this model, this paper presents the necessary and sufficient conditions under which a feasible one-wafer cyclic schedule exists. Then, it gives efficient algorithms to find such a schedule that is optimal. These algorithms require determining the robots' waiting time via simple calculation and thus are efficient. Examples are given to show the application and effectiveness of the proposed method.

Original languageEnglish (US)
Article number7436814
Pages (from-to)2920-2932
Number of pages13
JournalIEEE Transactions on Systems, Man, and Cybernetics: Systems
Volume47
Issue number11
DOIs
StatePublished - Nov 2017

All Science Journal Classification (ASJC) codes

  • Software
  • Control and Systems Engineering
  • Human-Computer Interaction
  • Computer Science Applications
  • Electrical and Electronic Engineering

Keywords

  • Discrete event systems
  • Petri net (PN)
  • multicluster tools
  • scheduling
  • semiconductor manufacturing

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