TY - GEN
T1 - Optimal scheduling analysis of treelike hybrid multi-cluster tools
AU - Yang, Fajun
AU - Wu, Naiqi
AU - Qiao, Yan
AU - Zhou, Mengchu
N1 - Funding Information:
This work is supported in part by NSF of China under Grant 61273036 and FDCT of Macau under Grant 065/2013/A2.
Publisher Copyright:
© 2016 IEEE.
PY - 2016/11/14
Y1 - 2016/11/14
N2 - A hybrid multi-cluster tool is composed of both dual and single-arm robotic tools. Since their behavior is different, it is very challenging to coordinate their activities in such a tool and to schedule it optimally. This work aims at finding such a schedule for a treelike hybrid multi-cluster tool whose bottleneck tool is assumed to be process-bound. Resource-oriented Petri nets are extended to model the system. With the model, this work shows the conditions under which there is a one-wafer cyclic schedule such that the least cycle time can be obtained. An efficient algorithm is proposed then to test the existence of such a schedule and find it if existing. Example is given to illustrate the derived approaches.
AB - A hybrid multi-cluster tool is composed of both dual and single-arm robotic tools. Since their behavior is different, it is very challenging to coordinate their activities in such a tool and to schedule it optimally. This work aims at finding such a schedule for a treelike hybrid multi-cluster tool whose bottleneck tool is assumed to be process-bound. Resource-oriented Petri nets are extended to model the system. With the model, this work shows the conditions under which there is a one-wafer cyclic schedule such that the least cycle time can be obtained. An efficient algorithm is proposed then to test the existence of such a schedule and find it if existing. Example is given to illustrate the derived approaches.
UR - http://www.scopus.com/inward/record.url?scp=85000995898&partnerID=8YFLogxK
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U2 - 10.1109/COASE.2016.7743573
DO - 10.1109/COASE.2016.7743573
M3 - Conference contribution
AN - SCOPUS:85000995898
T3 - IEEE International Conference on Automation Science and Engineering
SP - 1400
EP - 1404
BT - 2016 IEEE International Conference on Automation Science and Engineering, CASE 2016
PB - IEEE Computer Society
T2 - 2016 IEEE International Conference on Automation Science and Engineering, CASE 2016
Y2 - 21 August 2016 through 24 August 2016
ER -