@inproceedings{99c0f25adc79452b88c8b221df382831,
title = "Optimal scheduling analysis of treelike hybrid multi-cluster tools",
abstract = "A hybrid multi-cluster tool is composed of both dual and single-arm robotic tools. Since their behavior is different, it is very challenging to coordinate their activities in such a tool and to schedule it optimally. This work aims at finding such a schedule for a treelike hybrid multi-cluster tool whose bottleneck tool is assumed to be process-bound. Resource-oriented Petri nets are extended to model the system. With the model, this work shows the conditions under which there is a one-wafer cyclic schedule such that the least cycle time can be obtained. An efficient algorithm is proposed then to test the existence of such a schedule and find it if existing. Example is given to illustrate the derived approaches.",
author = "Fajun Yang and Naiqi Wu and Yan Qiao and Mengchu Zhou",
note = "Publisher Copyright: {\textcopyright} 2016 IEEE.; 2016 IEEE International Conference on Automation Science and Engineering, CASE 2016 ; Conference date: 21-08-2016 Through 24-08-2016",
year = "2016",
month = nov,
day = "14",
doi = "10.1109/COASE.2016.7743573",
language = "English (US)",
series = "IEEE International Conference on Automation Science and Engineering",
publisher = "IEEE Computer Society",
pages = "1400--1404",
booktitle = "2016 IEEE International Conference on Automation Science and Engineering, CASE 2016",
address = "United States",
}