Optimal Scheduling of Complex Multi-Cluster Tools Based on Timed Resource-Oriented Petri Nets

Keyphrases

• Optimal Scheduling 100%
• Resource-oriented Petri Net 100%
• Multi-cluster Tools 100%
• Periodic Schedules 100%
• Tree Structure 33%
• Structural Complexity 33%
• Scheduling Problem 33%
• Effective Operation 33%
• Semiconductor Manufacturing 33%
• Wafer 33%
• Industrial Examples 33%
• Multiple Robots 33%
• Polynomial Complexity 33%
• Optimal Cycle Time 33%
• Discrete Event Modeling 33%

Mathematics

• Polynomial 100%
• Necessary and Sufficient Condition 100%
• Tree-Like 100%
• Model Event 100%

Computer Science

• Petri Net 100%
• Scheduling Problem 50%
• Sufficient Condition 50%
• multiple robot 50%
• Polynomial Complexity 50%