Optimizing close-down processes of single-robot cluster tools via linear programing

Yan Qiao, Mengchu Zhou, Naiqi Wu, Qinghua Zhu, Zhiwu Li

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

In a cluster tool, periodical maintenance and lot switching operations require that the tool should be emptied from time to time. Thus, it is very important to optimize a normal close-down process from the steady state to the idle state. Besides, process modules (PMs) are prone to failure. When a PM at a step without any other parallel PMs fails, the tool cannot complete the entire process of any new wafer and some already in the tool. We need to close down the tool to empty it as well. Optimal scheduling of a close-down process is important yet challenging. Wafer residency time constraints make it even more challenging. By assuming no parallel PM at a step, this work focuses on time-constrained single-arm cluster tools in order to optimize their close-down process with and without PM failure. It first develops a linear program to optimize a normal close-down process. It then presents PM failure control rules to deal with the wafer in a failed PM and develops one more linear program to find an optimal schedule for the close-down process with PM failure. This work finally gives a real industrial case to show the new research results.

Original languageEnglish (US)
Title of host publication2016 IEEE International Conference on Automation Science and Engineering, CASE 2016
PublisherIEEE Computer Society
Pages148-153
Number of pages6
ISBN (Electronic)9781509024094
DOIs
StatePublished - Nov 14 2016
Event2016 IEEE International Conference on Automation Science and Engineering, CASE 2016 - Fort Worth, United States
Duration: Aug 21 2016Aug 24 2016

Publication series

NameIEEE International Conference on Automation Science and Engineering
Volume2016-November
ISSN (Print)2161-8070
ISSN (Electronic)2161-8089

Other

Other2016 IEEE International Conference on Automation Science and Engineering, CASE 2016
CountryUnited States
CityFort Worth
Period8/21/168/24/16

All Science Journal Classification (ASJC) codes

  • Control and Systems Engineering
  • Electrical and Electronic Engineering

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