Ordering and self-organized growth of Si in the Si/SiO₂ superlattice system

We have observed self-organization in Si nanocrystals fabricated by high temperature annealing of nanometer-thick layers of amorphous Si confined between thin SiO₂ layers. Silicon nanoparticles larger than ∼ 8 nm spontaneously form brick-shaped crystallites oriented along the [1 1 1] direction while smaller nanocrystals adopt a more spherical geometry. The observed ordering and self-organization are important steps towards reproducible maskless Si nanofabrication and the consequent construction of Si/SiO₂ quantum devices.