Oxygen ion implanted germanium - structural properties

N. M. Ravindra; T. Fink; W. Savin; T. P. Sjoreen; R. L. Pfeffer; L. G. Yerke; R. T. Lareau; J. G. Gualtieri; R. Lux; C. Wrenn

doi:10.1016/0168-583X(90)90738-G

Oxygen ion implanted germanium - structural properties

N. M. Ravindra, T. Fink, W. Savin, T. P. Sjoreen, R. L. Pfeffer, L. G. Yerke, R. T. Lareau, J. G. Gualtieri, R. Lux, C. Wrenn

Physics

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Abstract

Experimental studies of the structural and optical properties of oxygen implanted Ge have been reported here. The implantations were performed at different substrate temperatures in the range of liquid nitrogen to 370 °C. Measurement techniques such as Rutherford backscattering (RBS), secondary ion mass spectrometry (SIMS) and electron spin resonance (ESR) have been employed to characterize the nature of the samples. In each case, attempts have been made to compare the results obtained from similar measurements made on GeO₂ glasses fused from melting very pure GeO₂ powder at temperatures in the range of 1450-1650°C. For the first time in the literature, the formation of GeO₂ glasses by ion implantation of oxygen into Ge has been evidenced here.

Original language	English (US)
Pages (from-to)	409-412
Number of pages	4
Journal	Nuclear Inst. and Methods in Physics Research, B
Volume	46
Issue number	1-4
DOIs	https://doi.org/10.1016/0168-583X(90)90738-G
State	Published - Feb 1 1990

All Science Journal Classification (ASJC) codes

Nuclear and High Energy Physics
Instrumentation

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10.1016/0168-583X(90)90738-G

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title = "Oxygen ion implanted germanium - structural properties",

abstract = "Experimental studies of the structural and optical properties of oxygen implanted Ge have been reported here. The implantations were performed at different substrate temperatures in the range of liquid nitrogen to 370 °C. Measurement techniques such as Rutherford backscattering (RBS), secondary ion mass spectrometry (SIMS) and electron spin resonance (ESR) have been employed to characterize the nature of the samples. In each case, attempts have been made to compare the results obtained from similar measurements made on GeO2 glasses fused from melting very pure GeO2 powder at temperatures in the range of 1450-1650°C. For the first time in the literature, the formation of GeO2 glasses by ion implantation of oxygen into Ge has been evidenced here.",

author = "Ravindra, {N. M.} and T. Fink and W. Savin and Sjoreen, {T. P.} and Pfeffer, {R. L.} and Yerke, {L. G.} and Lareau, {R. T.} and Gualtieri, {J. G.} and R. Lux and C. Wrenn",

year = "1990",

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doi = "10.1016/0168-583X(90)90738-G",

language = "English (US)",

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pages = "409--412",

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TY - JOUR

T1 - Oxygen ion implanted germanium - structural properties

AU - Ravindra, N. M.

AU - Fink, T.

AU - Savin, W.

AU - Sjoreen, T. P.

AU - Pfeffer, R. L.

AU - Yerke, L. G.

AU - Lareau, R. T.

AU - Gualtieri, J. G.

AU - Lux, R.

AU - Wrenn, C.

PY - 1990/2/1

Y1 - 1990/2/1

N2 - Experimental studies of the structural and optical properties of oxygen implanted Ge have been reported here. The implantations were performed at different substrate temperatures in the range of liquid nitrogen to 370 °C. Measurement techniques such as Rutherford backscattering (RBS), secondary ion mass spectrometry (SIMS) and electron spin resonance (ESR) have been employed to characterize the nature of the samples. In each case, attempts have been made to compare the results obtained from similar measurements made on GeO2 glasses fused from melting very pure GeO2 powder at temperatures in the range of 1450-1650°C. For the first time in the literature, the formation of GeO2 glasses by ion implantation of oxygen into Ge has been evidenced here.

AB - Experimental studies of the structural and optical properties of oxygen implanted Ge have been reported here. The implantations were performed at different substrate temperatures in the range of liquid nitrogen to 370 °C. Measurement techniques such as Rutherford backscattering (RBS), secondary ion mass spectrometry (SIMS) and electron spin resonance (ESR) have been employed to characterize the nature of the samples. In each case, attempts have been made to compare the results obtained from similar measurements made on GeO2 glasses fused from melting very pure GeO2 powder at temperatures in the range of 1450-1650°C. For the first time in the literature, the formation of GeO2 glasses by ion implantation of oxygen into Ge has been evidenced here.

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SN - 0168-583X

VL - 46

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EP - 412

JO - Nuclear Inst. and Methods in Physics Research, B

JF - Nuclear Inst. and Methods in Physics Research, B

IS - 1-4

ER -

Oxygen ion implanted germanium - structural properties

Abstract

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