Oxygen vacancy defect engineering using atomic layer deposited HfAlOx in multi-layered gate stack

M. N. Bhuyian, R. Sengupta, P. Vurikiti, D. Misra

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Abstract

This work evaluates the defects in high quality atomic layer deposited (ALD) HfAlOx with extremely low Al (<3% Al/(Al + Hf)) incorporation in the Hf based high-k dielectrics. The defect activation energy estimated by the high temperature current voltage measurement shows that the charged oxygen vacancies, V+/V2+, are the primary source of defects in these dielectrics. When Al is added in HfO2, the V+ type defects with a defect activation energy of Ea ∼ 0.2 eV modify to V2+ type to Ea ∼ 0.1 eV with reference to the Si conduction band. When devices were stressed in the gate injection mode for 1000 s, more V+ type defects are generated and Ea reverts back to ∼0.2 eV. Since Al has a less number of valence electrons than do Hf, the change in the co-ordination number due to Al incorporation seems to contribute to the defect level modifications. Additionally, the stress induced leakage current behavior observed at 20 °C and at 125°C demonstrates that the addition of Al in HfO2 contributed to suppressed trap generation process. This further supports the defect engineering model as reduced flat-band voltage shifts were observed at 20 °C and at 125 °C.

Original languageEnglish (US)
Article number183501
JournalApplied Physics Letters
Volume108
Issue number18
DOIs
StatePublished - May 2 2016

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy (miscellaneous)

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