Parameter estimation in a dynamic model for rapid thermal processing: theory and experimental results

Sergey Belikov, Michael Kaplinsky, Bernard Friedland

Research output: Contribution to journalConference articlepeer-review

1 Scopus citations

Abstract

The state variables of the dynamics of heat transfer in a rapid thermal processing system can be efficiently represented by the coefficients of a Bessel function expansion of the temperature distribution in a circular wafer. An algorithm developed in 1993 by Friedland is investigated for estimating parameters in the differential equations for the Bessel coefficients. Simulation results, which show excellent performance, are supported by favorable experimental results obtained in an actual RTP chamber.

Original languageEnglish (US)
Pages (from-to)7-11
Number of pages5
JournalProceedings of the American Control Conference
Volume1
StatePublished - Jan 1 1995
EventProceedings of the 1995 American Control Conference. Part 1 (of 6) - Seattle, WA, USA
Duration: Jun 21 1995Jun 23 1995

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering

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