Parameter estimation in a dynamic model for rapid thermal processing: theory and experimental results

Keyphrases

• Dynamic Model 100%
• Rapid Thermal Processing 100%
• Parameter Estimation 100%
• Differential Equations 50%
• Heat Transfer 50%
• Wafer 50%
• Processing System 50%
• Temperature Distribution 50%
• Excellent Performance 50%
• Function Expansion 50%
• Bessel Functions 50%
• Bessel 50%

Engineering

• Experimental Result 100%
• Rapid Thermal Processing 100%
• Dynamic Models 100%
• Parameter Estimation 100%
• State Variable 50%
• Simulation Result 50%
• Processing System 50%
• Temperature Distribution 50%
• Bessel Function 50%

Chemical Engineering

• Temperature Distribution 100%