Parametric study of synthesis conditions in plasma-enhanced CVD of high-quality single-walled carbon nanotubes

Matthew R. Maschmann; Placidus B. Amama; Amit Goyal; Zafar Iqbal; Roy Gat; Timothy S. Fisher

doi:10.1016/j.carbon.2005.07.027

Parametric study of synthesis conditions in plasma-enhanced CVD of high-quality single-walled carbon nanotubes

Matthew R. Maschmann, Placidus B. Amama, Amit Goyal, Zafar Iqbal, Roy Gat, Timothy S. Fisher

Chemistry and Environmental Science

Research output: Contribution to journal › Article › peer-review

99 Scopus citations

Abstract

High-quality single-walled carbon nanotubes (SWCNTs) have been synthesized from H₂-CH₄ mixtures on a MgO-supported bimetallic Mo/Co catalyst using microwave plasma-enhanced chemical vapor deposition (PECVD). Reaction parameters including temperature, H₂:CH₄ ratio, plasma power, and synthesis time have been examined to assess their influence on SWCNT synthesis. Raman spectroscopy and high-resolution field emission scanning electron microscopy reveal that the quality, selectivity, density and predominant diameter of SWCNTs depend on the varied synthesis parameters. Results of this study can be used to optimize SWCNT synthesis conditions and products and to improve understanding of the growth of SWCNTs by PECVD.

Original language	English (US)
Pages (from-to)	10-18
Number of pages	9
Journal	Carbon
Volume	44
Issue number	1
DOIs	https://doi.org/10.1016/j.carbon.2005.07.027
State	Published - Jan 2006

All Science Journal Classification (ASJC) codes

General Chemistry
General Materials Science

Keywords

Carbon nanotubes
Plasma deposition
Raman spectroscopy

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10.1016/j.carbon.2005.07.027

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@article{b65374660b2647cfadbfa38a440eb12a,

title = "Parametric study of synthesis conditions in plasma-enhanced CVD of high-quality single-walled carbon nanotubes",

abstract = "High-quality single-walled carbon nanotubes (SWCNTs) have been synthesized from H2-CH4 mixtures on a MgO-supported bimetallic Mo/Co catalyst using microwave plasma-enhanced chemical vapor deposition (PECVD). Reaction parameters including temperature, H2:CH4 ratio, plasma power, and synthesis time have been examined to assess their influence on SWCNT synthesis. Raman spectroscopy and high-resolution field emission scanning electron microscopy reveal that the quality, selectivity, density and predominant diameter of SWCNTs depend on the varied synthesis parameters. Results of this study can be used to optimize SWCNT synthesis conditions and products and to improve understanding of the growth of SWCNTs by PECVD.",

keywords = "Carbon nanotubes, Plasma deposition, Raman spectroscopy",

author = "Maschmann, {Matthew R.} and Amama, {Placidus B.} and Amit Goyal and Zafar Iqbal and Roy Gat and Fisher, {Timothy S.}",

note = "Funding Information: Purdue authors acknowledge funding from the NASA-Purdue Institute for Nanoelectronics and Computing and the Birck Nanotechnology Center in support of this work, Mr. Jun Xu and Dr. Xi Zhang for TEM and AFM assistance, as well as Dr. Hartmut Hedderich for his assistance and expertise with Raman spectroscopy. NJIT authors acknowledge US Army and NSF grants in support of this work.",

year = "2006",

month = jan,

doi = "10.1016/j.carbon.2005.07.027",

language = "English (US)",

volume = "44",

pages = "10--18",

journal = "Carbon",

issn = "0008-6223",

publisher = "Elsevier Ltd",

number = "1",

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T1 - Parametric study of synthesis conditions in plasma-enhanced CVD of high-quality single-walled carbon nanotubes

AU - Maschmann, Matthew R.

AU - Amama, Placidus B.

AU - Goyal, Amit

AU - Iqbal, Zafar

AU - Gat, Roy

AU - Fisher, Timothy S.

N1 - Funding Information: Purdue authors acknowledge funding from the NASA-Purdue Institute for Nanoelectronics and Computing and the Birck Nanotechnology Center in support of this work, Mr. Jun Xu and Dr. Xi Zhang for TEM and AFM assistance, as well as Dr. Hartmut Hedderich for his assistance and expertise with Raman spectroscopy. NJIT authors acknowledge US Army and NSF grants in support of this work.

PY - 2006/1

Y1 - 2006/1

N2 - High-quality single-walled carbon nanotubes (SWCNTs) have been synthesized from H2-CH4 mixtures on a MgO-supported bimetallic Mo/Co catalyst using microwave plasma-enhanced chemical vapor deposition (PECVD). Reaction parameters including temperature, H2:CH4 ratio, plasma power, and synthesis time have been examined to assess their influence on SWCNT synthesis. Raman spectroscopy and high-resolution field emission scanning electron microscopy reveal that the quality, selectivity, density and predominant diameter of SWCNTs depend on the varied synthesis parameters. Results of this study can be used to optimize SWCNT synthesis conditions and products and to improve understanding of the growth of SWCNTs by PECVD.

AB - High-quality single-walled carbon nanotubes (SWCNTs) have been synthesized from H2-CH4 mixtures on a MgO-supported bimetallic Mo/Co catalyst using microwave plasma-enhanced chemical vapor deposition (PECVD). Reaction parameters including temperature, H2:CH4 ratio, plasma power, and synthesis time have been examined to assess their influence on SWCNT synthesis. Raman spectroscopy and high-resolution field emission scanning electron microscopy reveal that the quality, selectivity, density and predominant diameter of SWCNTs depend on the varied synthesis parameters. Results of this study can be used to optimize SWCNT synthesis conditions and products and to improve understanding of the growth of SWCNTs by PECVD.

KW - Carbon nanotubes

KW - Plasma deposition

KW - Raman spectroscopy

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DO - 10.1016/j.carbon.2005.07.027

M3 - Article

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SN - 0008-6223

VL - 44

SP - 10

EP - 18

JO - Carbon

JF - Carbon

IS - 1

ER -

Parametric study of synthesis conditions in plasma-enhanced CVD of high-quality single-walled carbon nanotubes

Abstract

All Science Journal Classification (ASJC) codes

Keywords

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