Patterning micro- and nano-structured FePt by direct imprint lithography

Keyphrases

• Nanostructures 100%
• Micro-nano 100%
• Microstructure 100%
• FePt 100%
• Self-aligned Imprint Lithography 100%
• Silicon Substrate 40%
• Pattern-based Approach 40%
• PDMS Stamp 40%
• Functional Materials 20%
• High-throughput 20%
• Carbon Nanotubes 20%
• Magnetic Properties 20%
• Chemical Catalysis 20%
• Mass Production 20%
• X-ray Lithography 20%
• Electron Beam Lithography 20%
• High Thermal Stability 20%
• Scanning Electron Microscopy 20%
• Silicon Wafer 20%
• Annealing 20%
• Magnetic Force Microscopy 20%
• Microscopic Image 20%
• Etching Process 20%
• Micropatterning 20%
• Hole Array 20%
• Line Array 20%
• Nanopatterning 20%
• Ferromagnetic Properties 20%
• Recording Media 20%
• Active Chemicals 20%

Material Science

• Lithography 100%
• Silicon 40%
• Functional Material 20%
• Catalysis 20%
• Carbon Nanotube 20%
• Magnetic Property 20%
• Scanning Electron Microscopy 20%
• Silicon Wafer 20%
• Annealing 20%
• Thermal Stability 20%