Petri net-based cycle time analysis of dual-arm cluster tools with wafer revisiting and swapping strategy

Naiqi Wu, Feng Chu, Chengbin Chu, Mengchu Zhou

Research output: Chapter in Book/Report/Conference proceedingConference contribution

19 Scopus citations

Abstract

There are wafer fabrication processes in cluster tools that require revisiting. It is shown that swapping is efficient in operating a dual-arm cluster tool. For dual-arm cluster tools with wafer revisiting, if a swap strategy is applied, it forms a three wafer periodical process with three wafers completed in each period. Such a period contains three cycles in a revisiting process and another three cycles in non-revisiting process. Hence, analysis and scheduling of dual-arm cluster tools with wafer revisiting become very complicated. In this work, a Petri net model is developed to describe the operations of such tools. Based on it, it is found that if a swap strategy is applied to a dual-arm cluster tool with wafer revisiting, it is always in a transient state. A systematic method is presented to analyze its performance.

Original languageEnglish (US)
Title of host publication2011 IEEE International Conference on Robotics and Automation, ICRA 2011
Pages5499-5504
Number of pages6
DOIs
StatePublished - Dec 1 2011
Event2011 IEEE International Conference on Robotics and Automation, ICRA 2011 - Shanghai, China
Duration: May 9 2011May 13 2011

Other

Other2011 IEEE International Conference on Robotics and Automation, ICRA 2011
CountryChina
CityShanghai
Period5/9/115/13/11

All Science Journal Classification (ASJC) codes

  • Software
  • Control and Systems Engineering
  • Artificial Intelligence
  • Electrical and Electronic Engineering

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