Petri net-based cycle time analysis of dual-arm cluster tools with wafer revisiting and swapping strategy

Naiqi Wu; Feng Chu; Chengbin Chu; Mengchu Zhou

doi:10.1109/ICRA.2011.5980119

Petri net-based cycle time analysis of dual-arm cluster tools with wafer revisiting and swapping strategy

Naiqi Wu, Feng Chu, Chengbin Chu, Mengchu Zhou

Electrical and Computer Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

19 Scopus citations

Abstract

There are wafer fabrication processes in cluster tools that require revisiting. It is shown that swapping is efficient in operating a dual-arm cluster tool. For dual-arm cluster tools with wafer revisiting, if a swap strategy is applied, it forms a three wafer periodical process with three wafers completed in each period. Such a period contains three cycles in a revisiting process and another three cycles in non-revisiting process. Hence, analysis and scheduling of dual-arm cluster tools with wafer revisiting become very complicated. In this work, a Petri net model is developed to describe the operations of such tools. Based on it, it is found that if a swap strategy is applied to a dual-arm cluster tool with wafer revisiting, it is always in a transient state. A systematic method is presented to analyze its performance.

Original language	English (US)
Title of host publication	2011 IEEE International Conference on Robotics and Automation, ICRA 2011
Pages	5499-5504
Number of pages	6
DOIs	https://doi.org/10.1109/ICRA.2011.5980119
State	Published - Dec 1 2011
Event	2011 IEEE International Conference on Robotics and Automation, ICRA 2011 - Shanghai, China Duration: May 9 2011 → May 13 2011

Other

Other	2011 IEEE International Conference on Robotics and Automation, ICRA 2011
Country	China
City	Shanghai
Period	5/9/11 → 5/13/11

All Science Journal Classification (ASJC) codes

Software
Control and Systems Engineering
Artificial Intelligence
Electrical and Electronic Engineering

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10.1109/ICRA.2011.5980119

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Cite this

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title = "Petri net-based cycle time analysis of dual-arm cluster tools with wafer revisiting and swapping strategy",

abstract = "There are wafer fabrication processes in cluster tools that require revisiting. It is shown that swapping is efficient in operating a dual-arm cluster tool. For dual-arm cluster tools with wafer revisiting, if a swap strategy is applied, it forms a three wafer periodical process with three wafers completed in each period. Such a period contains three cycles in a revisiting process and another three cycles in non-revisiting process. Hence, analysis and scheduling of dual-arm cluster tools with wafer revisiting become very complicated. In this work, a Petri net model is developed to describe the operations of such tools. Based on it, it is found that if a swap strategy is applied to a dual-arm cluster tool with wafer revisiting, it is always in a transient state. A systematic method is presented to analyze its performance.",

author = "Naiqi Wu and Feng Chu and Chengbin Chu and Mengchu Zhou",

year = "2011",

month = dec,

day = "1",

doi = "10.1109/ICRA.2011.5980119",

language = "English (US)",

isbn = "9781612843865",

pages = "5499--5504",

booktitle = "2011 IEEE International Conference on Robotics and Automation, ICRA 2011",

note = "2011 IEEE International Conference on Robotics and Automation, ICRA 2011 ; Conference date: 09-05-2011 Through 13-05-2011",

}

Wu, N, Chu, F, Chu, C & Zhou, M 2011, Petri net-based cycle time analysis of dual-arm cluster tools with wafer revisiting and swapping strategy. in 2011 IEEE International Conference on Robotics and Automation, ICRA 2011., 5980119, pp. 5499-5504, 2011 IEEE International Conference on Robotics and Automation, ICRA 2011, Shanghai, China, 5/9/11. https://doi.org/10.1109/ICRA.2011.5980119

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AU - Wu, Naiqi

AU - Chu, Feng

AU - Chu, Chengbin

AU - Zhou, Mengchu

PY - 2011/12/1

Y1 - 2011/12/1

N2 - There are wafer fabrication processes in cluster tools that require revisiting. It is shown that swapping is efficient in operating a dual-arm cluster tool. For dual-arm cluster tools with wafer revisiting, if a swap strategy is applied, it forms a three wafer periodical process with three wafers completed in each period. Such a period contains three cycles in a revisiting process and another three cycles in non-revisiting process. Hence, analysis and scheduling of dual-arm cluster tools with wafer revisiting become very complicated. In this work, a Petri net model is developed to describe the operations of such tools. Based on it, it is found that if a swap strategy is applied to a dual-arm cluster tool with wafer revisiting, it is always in a transient state. A systematic method is presented to analyze its performance.

AB - There are wafer fabrication processes in cluster tools that require revisiting. It is shown that swapping is efficient in operating a dual-arm cluster tool. For dual-arm cluster tools with wafer revisiting, if a swap strategy is applied, it forms a three wafer periodical process with three wafers completed in each period. Such a period contains three cycles in a revisiting process and another three cycles in non-revisiting process. Hence, analysis and scheduling of dual-arm cluster tools with wafer revisiting become very complicated. In this work, a Petri net model is developed to describe the operations of such tools. Based on it, it is found that if a swap strategy is applied to a dual-arm cluster tool with wafer revisiting, it is always in a transient state. A systematic method is presented to analyze its performance.

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