Abstract
There are wafer fabrication processes in cluster tools that require revisiting. It is shown that swapping is efficient in operating a dual-arm cluster tool. For dual-arm cluster tools with wafer revisiting, if a swap strategy is applied, it forms a three wafer periodical process with three wafers completed in each period. Such a period contains three cycles in a revisiting process and another three cycles in non-revisiting process. Hence, analysis and scheduling of dual-arm cluster tools with wafer revisiting become very complicated. In this work, a Petri net model is developed to describe the operations of such tools. Based on it, it is found that if a swap strategy is applied to a dual-arm cluster tool with wafer revisiting, it is always in a transient state. A systematic method is presented to analyze its performance.
| Original language | English (US) |
|---|---|
| Title of host publication | 2011 IEEE International Conference on Robotics and Automation, ICRA 2011 |
| Pages | 5499-5504 |
| Number of pages | 6 |
| DOIs | |
| State | Published - Dec 1 2011 |
| Event | 2011 IEEE International Conference on Robotics and Automation, ICRA 2011 - Shanghai, China Duration: May 9 2011 → May 13 2011 |
Other
| Other | 2011 IEEE International Conference on Robotics and Automation, ICRA 2011 |
|---|---|
| Country/Territory | China |
| City | Shanghai |
| Period | 5/9/11 → 5/13/11 |
All Science Journal Classification (ASJC) codes
- Software
- Control and Systems Engineering
- Artificial Intelligence
- Electrical and Electronic Engineering