Abstract
In an Internet-based control system, particular human operations may violate desired requirements and lead to destructive failure. For such human-in-the-loop systems, this paper extends the remote supervisory scheme in [5] to a modular one so as to reduce the supervisor synthesis complexity. Also, remote human issued commands are guaranteed to meet required specifications. A rapid thermal process in semiconductor manufacturing systems is provided to show the practicability of the proposed approach.
| Original language | English (US) |
|---|---|
| Pages | 311-316 |
| Number of pages | 6 |
| State | Published - 2004 |
| Event | SICE Annual Conference 2004 - Sapporo, Japan Duration: Aug 4 2004 → Aug 6 2004 |
Other
| Other | SICE Annual Conference 2004 |
|---|---|
| Country/Territory | Japan |
| City | Sapporo |
| Period | 8/4/04 → 8/6/04 |
All Science Journal Classification (ASJC) codes
- Control and Systems Engineering
- Computer Science Applications
- Electrical and Electronic Engineering
Keywords
- And supervisory control
- Human-in-the-loop
- Internet-based control systems
- Modular supervision
- Petri nets
- Rapid thermal processes