Petri net-based design of modular supervisors for remotely human control systems

Jin Shyan Lee, Meng Chu Zhou, Pau Lo Hsu

Research output: Contribution to conferencePaperpeer-review


In an Internet-based control system, particular human operations may violate desired requirements and lead to destructive failure. For such human-in-the-loop systems, this paper extends the remote supervisory scheme in [5] to a modular one so as to reduce the supervisor synthesis complexity. Also, remote human issued commands are guaranteed to meet required specifications. A rapid thermal process in semiconductor manufacturing systems is provided to show the practicability of the proposed approach.

Original languageEnglish (US)
Number of pages6
StatePublished - 2004
EventSICE Annual Conference 2004 - Sapporo, Japan
Duration: Aug 4 2004Aug 6 2004


OtherSICE Annual Conference 2004

All Science Journal Classification (ASJC) codes

  • Control and Systems Engineering
  • Computer Science Applications
  • Electrical and Electronic Engineering


  • And supervisory control
  • Human-in-the-loop
  • Internet-based control systems
  • Modular supervision
  • Petri nets
  • Rapid thermal processes


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