Petri net-based optimal one-wafer cyclic scheduling of hybrid multi-cluster tools in wafer fabrication

Fajun Yang, Naiqi Wu, Yan Qiao, Mengchu Zhou

Research output: Contribution to journalArticlepeer-review

43 Scopus citations

Abstract

In a multi-cluster tool, there may be both single and dual-arm cluster tools. Such a multi-cluster tool is called hybrid multi-cluster tool. To operate such a multi-cluster tool, one needs to coordinate different types of robots for accessing the shared buffering modules. Aiming at finding a one-wafer periodic schedule such that the lower bound of cycle time can be reached, this paper conducts a study on scheduling a hybrid multi-cluster tool with its bottleneck tool being process-bound. The tool is modeled by a kind of timed Petri net model. With this model, the scheduling problem is reduced to determining the robots' waiting time. Then, the conditions under which a one-wafer periodic schedule exists such that the lower bound of cycle time can be reached are presented. Based on them, a closed-form algorithm is given to check whether such a one-wafer periodic schedule exists. If so, it is found via simple calculation. Examples are given to show the application of the proposed method.

Original languageEnglish (US)
Article number6774498
Pages (from-to)192-203
Number of pages12
JournalIEEE Transactions on Semiconductor Manufacturing
Volume27
Issue number2
DOIs
StatePublished - May 2014

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Industrial and Manufacturing Engineering
  • Electrical and Electronic Engineering

Keywords

  • Multi-cluster tools
  • Petri net (PN)
  • scheduling
  • semiconductor manufacturing

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