Petri net-based response policies to process module failure in time-constrained single-arm cluster tools

Yan Qiao, Nai Qi Wu, Chun Rong Pan, Meng Chu Zhou

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

For wafer fabrication, a process module (PM) in cluster tools is prone to failure. It is crucial to deal with such failure in a proper and timely manner. With residency time constraints, if there are feasible periodic schedules in operating a cluster tool before and after a PM failure, it is desired to make it operate continuously when such a failure occurs. A Petri net model is developed to describe the dynamic behavior of a single-arm cluster tool and failure response policies are proposed to deal with a failure. The proposed policies are formulated via simple control laws for their real-time and on-line implementation. An example is presented to show their application.

Original languageEnglish (US)
Title of host publicationProceedings of the 11th IEEE International Conference on Networking, Sensing and Control, ICNSC 2014
PublisherIEEE Computer Society
Pages144-149
Number of pages6
ISBN (Print)9781479931064
DOIs
StatePublished - 2014
Event11th IEEE International Conference on Networking, Sensing and Control, ICNSC 2014 - Miami, FL, United States
Duration: Apr 7 2014Apr 9 2014

Publication series

NameProceedings of the 11th IEEE International Conference on Networking, Sensing and Control, ICNSC 2014

Other

Other11th IEEE International Conference on Networking, Sensing and Control, ICNSC 2014
CountryUnited States
CityMiami, FL
Period4/7/144/9/14

All Science Journal Classification (ASJC) codes

  • Computer Networks and Communications
  • Control and Systems Engineering

Keywords

  • Cluster tools
  • Failure response
  • Petri net
  • Scheduling
  • Semiconductor manufacturing

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