@inproceedings{d2774454d6454d6f8866e3b0ac8a544a,
title = "Petri net-based response policies to process module failure in time-constrained single-arm cluster tools",
abstract = "For wafer fabrication, a process module (PM) in cluster tools is prone to failure. It is crucial to deal with such failure in a proper and timely manner. With residency time constraints, if there are feasible periodic schedules in operating a cluster tool before and after a PM failure, it is desired to make it operate continuously when such a failure occurs. A Petri net model is developed to describe the dynamic behavior of a single-arm cluster tool and failure response policies are proposed to deal with a failure. The proposed policies are formulated via simple control laws for their real-time and on-line implementation. An example is presented to show their application.",
keywords = "Cluster tools, Failure response, Petri net, Scheduling, Semiconductor manufacturing",
author = "Yan Qiao and Wu, {Nai Qi} and Pan, {Chun Rong} and Zhou, {Meng Chu}",
year = "2014",
doi = "10.1109/ICNSC.2014.6819615",
language = "English (US)",
isbn = "9781479931064",
series = "Proceedings of the 11th IEEE International Conference on Networking, Sensing and Control, ICNSC 2014",
publisher = "IEEE Computer Society",
pages = "144--149",
booktitle = "Proceedings of the 11th IEEE International Conference on Networking, Sensing and Control, ICNSC 2014",
address = "United States",
note = "11th IEEE International Conference on Networking, Sensing and Control, ICNSC 2014 ; Conference date: 07-04-2014 Through 09-04-2014",
}