Petri net-based scheduling analysis of dual-arm cluster tools subject to wafer revisiting and residency time constraints

Yan Qiao, Nai Qi Wu, Mengchu Zhou, Qing Yun Dai

Research output: Chapter in Book/Report/Conference proceedingConference contribution

5 Scopus citations

Abstract

In semiconductor fabrication, it is very challenging to schedule a cluster tool with wafer revisiting and residency time constraints. For the typical wafer revisiting process of atomic layer deposition (ALD), a Petri net model is developed for the system. Then, with it and based on a 1-wafer cyclic scheduling method previously developed by the authors of this paper, schedulability conditions and scheduling algorithms are derived. The schedulability can be checked by analytical expressions. If schedulable, an optimal 1-wafer cyclic schedule can be analytically found. It is very computationally efficient. An illustrative example is given to show the application of the proposed approach.

Original languageEnglish (US)
Title of host publication2013 10th IEEE International Conference on Networking, Sensing and Control, ICNSC 2013
Pages252-257
Number of pages6
DOIs
StatePublished - Aug 14 2013
Event2013 10th IEEE International Conference on Networking, Sensing and Control, ICNSC 2013 - Evry, France
Duration: Apr 10 2013Apr 12 2013

Other

Other2013 10th IEEE International Conference on Networking, Sensing and Control, ICNSC 2013
CountryFrance
CityEvry
Period4/10/134/12/13

All Science Journal Classification (ASJC) codes

  • Computer Networks and Communications
  • Control and Systems Engineering

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