Petri net-based scheduling analysis of dual-arm cluster tools with wafer revisiting

Yan Qiao, Naiqi Wu, Mengchu Zhou

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

With wafer revisit, it is complicated to schedule cluster tools in semiconductor fabrication. In wafer fabrication processes, such as atomic layer deposition (ALD), the wafers need to visit some process modules for a number of times. The existing swap-based strategy can be used to operate a dual-arm cluster tool for such a process. It results in a 3-wafer cyclic schedule. However, it is not optimal in the sense of cycle time. Thus, to search for a better schedule, a Petri net model is developed for a dual-arm cluster tool with wafer revisit. With it, the properties of the 3-wafer schedule are analyzed. It is found that, to improve the performance, it is necessary to reduce the number of wafers completed in a cycle. Thus, a 1-wafer schedule is developed by using a new swap-based strategy.

Original languageEnglish (US)
Title of host publication2012 IEEE International Conference on Automation Science and Engineering
Subtitle of host publicationGreen Automation Toward a Sustainable Society, CASE 2012
Pages206-211
Number of pages6
DOIs
StatePublished - Dec 1 2012
Externally publishedYes
Event2012 IEEE International Conference on Automation Science and Engineering: Green Automation Toward a Sustainable Society, CASE 2012 - Seoul, Korea, Republic of
Duration: Aug 20 2012Aug 24 2012

Publication series

NameIEEE International Conference on Automation Science and Engineering
ISSN (Print)2161-8070
ISSN (Electronic)2161-8089

Other

Other2012 IEEE International Conference on Automation Science and Engineering: Green Automation Toward a Sustainable Society, CASE 2012
Country/TerritoryKorea, Republic of
CitySeoul
Period8/20/128/24/12

All Science Journal Classification (ASJC) codes

  • Control and Systems Engineering
  • Electrical and Electronic Engineering

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