TY - GEN
T1 - Petri net-based scheduling of time-constrained dual-arm cluster tools with bounded activity time variation
AU - Wu, Nai Qi
AU - Zhou, Meng Chu
PY - 2010
Y1 - 2010
N2 - For time-constrained cluster tool in semiconductor manufacturing, activity time variation can make an originally feasible schedule infeasible. With bounded activity time variation considered, this paper addresses their real-time scheduling issues and conducts their schedulability analysis. With Petri net (PN) model and a real-time control policy, this paper derives closed form schedulability conditions. If schedulable, an algorithm is developed to obtain an off-line periodic schedule. This schedule together with a real-time control policy forms a real-time schedule. It is optimal in terms of cycle time and can be analytically computed with closed form expressions.
AB - For time-constrained cluster tool in semiconductor manufacturing, activity time variation can make an originally feasible schedule infeasible. With bounded activity time variation considered, this paper addresses their real-time scheduling issues and conducts their schedulability analysis. With Petri net (PN) model and a real-time control policy, this paper derives closed form schedulability conditions. If schedulable, an algorithm is developed to obtain an off-line periodic schedule. This schedule together with a real-time control policy forms a real-time schedule. It is optimal in terms of cycle time and can be analytically computed with closed form expressions.
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U2 - 10.1109/COASE.2010.5584183
DO - 10.1109/COASE.2010.5584183
M3 - Conference contribution
AN - SCOPUS:78149458426
SN - 9781424454471
T3 - 2010 IEEE International Conference on Automation Science and Engineering, CASE 2010
SP - 465
EP - 470
BT - 2010 IEEE International Conference on Automation Science and Engineering, CASE 2010
T2 - 2010 IEEE International Conference on Automation Science and Engineering, CASE 2010
Y2 - 21 August 2010 through 24 August 2010
ER -