Petri net-based scheduling of time-constrained dual-arm cluster tools with bounded activity time variation

Nai Qi Wu, Mengchu Zhou

Research output: Chapter in Book/Report/Conference proceedingConference contribution

5 Scopus citations

Abstract

For time-constrained cluster tool in semiconductor manufacturing, activity time variation can make an originally feasible schedule infeasible. With bounded activity time variation considered, this paper addresses their real-time scheduling issues and conducts their schedulability analysis. With Petri net (PN) model and a real-time control policy, this paper derives closed form schedulability conditions. If schedulable, an algorithm is developed to obtain an off-line periodic schedule. This schedule together with a real-time control policy forms a real-time schedule. It is optimal in terms of cycle time and can be analytically computed with closed form expressions.

Original languageEnglish (US)
Title of host publication2010 IEEE International Conference on Automation Science and Engineering, CASE 2010
Pages465-470
Number of pages6
DOIs
StatePublished - Nov 17 2010
Event2010 IEEE International Conference on Automation Science and Engineering, CASE 2010 - Toronto, ON, Canada
Duration: Aug 21 2010Aug 24 2010

Publication series

Name2010 IEEE International Conference on Automation Science and Engineering, CASE 2010

Other

Other2010 IEEE International Conference on Automation Science and Engineering, CASE 2010
CountryCanada
CityToronto, ON
Period8/21/108/24/10

All Science Journal Classification (ASJC) codes

  • Control and Systems Engineering

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