Petri net modeling and cycle-time analysis of dual-arm cluster tools with wafer revisiting

Naiqi Wu, Feng Chu, Chengbin Chu, Mengchu Zhou

Research output: Contribution to journalArticlepeer-review

174 Scopus citations


There are wafer fabrication processes in cluster tools that require wafer revisiting. If a swap strategy is applied to dual-arm cluster tools handling wafer revisiting, a three-wafer periodical process is formed with three wafers completed in each period. Such a period contains three cycles in a revisiting process and three cycles in a nonrevisiting one. Hence, analysis and scheduling of such tools become very complicated. In this paper, a Petri net (PN) model is developed to describe their operations. Based on it, it is found that, if a swap strategy is applied, such tools are always in a transient state. A systematic method is then presented to analyze their performance. With the help of the proposed PN model, this work, for the first time, derives the optimality conditions of three-wafer period scheduling. Industrial application examples are given to show the results.

Original languageEnglish (US)
Pages (from-to)196-207
Number of pages12
JournalIEEE Transactions on Systems, Man, and Cybernetics Part A:Systems and Humans
Issue number1
StatePublished - 2013

All Science Journal Classification (ASJC) codes

  • Control and Systems Engineering
  • Software
  • Information Systems
  • Human-Computer Interaction
  • Computer Science Applications
  • Electrical and Electronic Engineering


  • Cluster tool
  • Discrete event system
  • Petri nets (PNs)
  • Scheduling
  • Semiconductor manufacturing.


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