There are wafer fabrication processes in cluster tools that require wafer revisiting. If a swap strategy is applied to dual-arm cluster tools handling wafer revisiting, a three-wafer periodical process is formed with three wafers completed in each period. Such a period contains three cycles in a revisiting process and three cycles in a nonrevisiting one. Hence, analysis and scheduling of such tools become very complicated. In this paper, a Petri net (PN) model is developed to describe their operations. Based on it, it is found that, if a swap strategy is applied, such tools are always in a transient state. A systematic method is then presented to analyze their performance. With the help of the proposed PN model, this work, for the first time, derives the optimality conditions of three-wafer period scheduling. Industrial application examples are given to show the results.
|Original language||English (US)|
|Number of pages||12|
|Journal||IEEE Transactions on Systems, Man, and Cybernetics Part A:Systems and Humans|
|State||Published - Jan 1 2013|
All Science Journal Classification (ASJC) codes
- Control and Systems Engineering
- Human-Computer Interaction
- Computer Science Applications
- Electrical and Electronic Engineering
- Cluster tool
- Discrete event system
- Petri nets (PNs)
- Semiconductor manufacturing.