Petri net modeling and one-wafer scheduling of single-arm multi-cluster tools

Qinghua Zhu, Naiqi Wu, Yan Qiao, Mengchu Zhou

Research output: Chapter in Book/Report/Conference proceedingConference contribution

11 Scopus citations

Abstract

It is very challenging to schedule a multi-cluster tool for it needs to coordinate the activities of multiple robots. This paper studies one-wafer cyclic scheduling for multi-cluster tools whose bottleneck cluster tool is process-bound. A Petri net model is developed to describe the system. Based on the model, it is shown that, for any multi-cluster tool whose bottleneck cluster tool is process-bound, there is always a one-wafer cyclic schedule. Then, a method is presented to find the minimal cycle time and the optimal one-wafer cyclic schedule. The method requires only simple calculation. An example illustrates the application and effectiveness of the proposed method.

Original languageEnglish (US)
Title of host publication2013 IEEE International Conference on Automation Science and Engineering, CASE 2013
Pages862-867
Number of pages6
DOIs
StatePublished - Dec 1 2013
Event2013 IEEE International Conference on Automation Science and Engineering, CASE 2013 - Madison, WI, United States
Duration: Aug 17 2013Aug 20 2013

Publication series

NameIEEE International Conference on Automation Science and Engineering
ISSN (Print)2161-8070
ISSN (Electronic)2161-8089

Other

Other2013 IEEE International Conference on Automation Science and Engineering, CASE 2013
CountryUnited States
CityMadison, WI
Period8/17/138/20/13

All Science Journal Classification (ASJC) codes

  • Control and Systems Engineering
  • Electrical and Electronic Engineering

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