TY - GEN
T1 - Petri net modeling and one-wafer scheduling of single-arm multi-cluster tools
AU - Zhu, Qinghua
AU - Wu, Naiqi
AU - Qiao, Yan
AU - Zhou, Mengchu
PY - 2013
Y1 - 2013
N2 - It is very challenging to schedule a multi-cluster tool for it needs to coordinate the activities of multiple robots. This paper studies one-wafer cyclic scheduling for multi-cluster tools whose bottleneck cluster tool is process-bound. A Petri net model is developed to describe the system. Based on the model, it is shown that, for any multi-cluster tool whose bottleneck cluster tool is process-bound, there is always a one-wafer cyclic schedule. Then, a method is presented to find the minimal cycle time and the optimal one-wafer cyclic schedule. The method requires only simple calculation. An example illustrates the application and effectiveness of the proposed method.
AB - It is very challenging to schedule a multi-cluster tool for it needs to coordinate the activities of multiple robots. This paper studies one-wafer cyclic scheduling for multi-cluster tools whose bottleneck cluster tool is process-bound. A Petri net model is developed to describe the system. Based on the model, it is shown that, for any multi-cluster tool whose bottleneck cluster tool is process-bound, there is always a one-wafer cyclic schedule. Then, a method is presented to find the minimal cycle time and the optimal one-wafer cyclic schedule. The method requires only simple calculation. An example illustrates the application and effectiveness of the proposed method.
UR - http://www.scopus.com/inward/record.url?scp=84891520091&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84891520091&partnerID=8YFLogxK
U2 - 10.1109/CoASE.2013.6653915
DO - 10.1109/CoASE.2013.6653915
M3 - Conference contribution
AN - SCOPUS:84891520091
SN - 9781479915156
T3 - IEEE International Conference on Automation Science and Engineering
SP - 862
EP - 867
BT - 2013 IEEE International Conference on Automation Science and Engineering, CASE 2013
T2 - 2013 IEEE International Conference on Automation Science and Engineering, CASE 2013
Y2 - 17 August 2013 through 20 August 2013
ER -