Petri net modeling and one-wafer scheduling of single-arm multi-cluster tools

Qinghua Zhu, Naiqi Wu, Yan Qiao, Mengchu Zhou

Research output: Chapter in Book/Report/Conference proceedingConference contribution

11 Scopus citations

Fingerprint

Dive into the research topics of 'Petri net modeling and one-wafer scheduling of single-arm multi-cluster tools'. Together they form a unique fingerprint.

Keyphrases

Engineering

Social Sciences