Petri net modeling and one-wafer scheduling of single-arm tree-like multi-cluster tools

Qinghua Zhu, Yan Qiao, Mengchu Zhou

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Scopus citations

Abstract

It is very challenging to obtain a one-wafer cyclic schedule for the widely used multi-cluster tools in semiconductor manufacturing. This work studies the scheduling problem for a single-arm tree-like multi-cluster tool that is process-dominant. A resource-oriented Petri net (PN) model is developed to describe its operation behavior by explicitly modeling robot waiting. Based on it, sufficient and necessary conditions are for the first time established to find a one-wafer periodic schedule. By determining robot waiting time, efficient algorithms are proposed to find such a schedule with the minimal cycle time. An example is used to show its application.

Original languageEnglish (US)
Title of host publication2015 IEEE Conference on Automation Science and Engineering
Subtitle of host publicationAutomation for a Sustainable Future, CASE 2015
PublisherIEEE Computer Society
Pages292-297
Number of pages6
ISBN (Electronic)9781467381833
DOIs
StatePublished - Oct 7 2015
Event11th IEEE International Conference on Automation Science and Engineering, CASE 2015 - Gothenburg, Sweden
Duration: Aug 24 2015Aug 28 2015

Publication series

NameIEEE International Conference on Automation Science and Engineering
Volume2015-October
ISSN (Print)2161-8070
ISSN (Electronic)2161-8089

Other

Other11th IEEE International Conference on Automation Science and Engineering, CASE 2015
CountrySweden
CityGothenburg
Period8/24/158/28/15

All Science Journal Classification (ASJC) codes

  • Control and Systems Engineering
  • Electrical and Electronic Engineering

Keywords

  • Multi-cluster tools
  • Petri nets
  • Scheduling

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