@inproceedings{740190d7b025401786b1376d157a5624,
title = "Petri net modeling and one-wafer scheduling of single-arm tree-like multi-cluster tools",
abstract = "It is very challenging to obtain a one-wafer cyclic schedule for the widely used multi-cluster tools in semiconductor manufacturing. This work studies the scheduling problem for a single-arm tree-like multi-cluster tool that is process-dominant. A resource-oriented Petri net (PN) model is developed to describe its operation behavior by explicitly modeling robot waiting. Based on it, sufficient and necessary conditions are for the first time established to find a one-wafer periodic schedule. By determining robot waiting time, efficient algorithms are proposed to find such a schedule with the minimal cycle time. An example is used to show its application.",
keywords = "Multi-cluster tools, Petri nets, Scheduling",
author = "Qinghua Zhu and Yan Qiao and Mengchu Zhou",
note = "Publisher Copyright: {\textcopyright} 2015 IEEE.; 11th IEEE International Conference on Automation Science and Engineering, CASE 2015 ; Conference date: 24-08-2015 Through 28-08-2015",
year = "2015",
month = oct,
day = "7",
doi = "10.1109/CoASE.2015.7294094",
language = "English (US)",
series = "IEEE International Conference on Automation Science and Engineering",
publisher = "IEEE Computer Society",
pages = "292--297",
booktitle = "2015 IEEE Conference on Automation Science and Engineering",
address = "United States",
}