Petri net modeling and real-time control of dual-arm cluster tools with residency time constraint and activity time variations

Wu NaiQi, Mengchu Zhou, Peng ShihSen, Feng Chu, Chengbin Chu

Research output: Chapter in Book/Report/Conference proceedingConference contribution

11 Scopus citations

Abstract

Because of residency time constraints and activity time variation of cluster tools, it is very difficult to operate them. This paper addresses their real-time control issues. A Petri net (PN) model is developed to model them. This model describes the robot activity sequence with robot waits included. Via this model, to operate a cluster tool is to determine robot wait times and a two-level operation architecture is proposed, which includes an off-line periodic scheduler and real-time controller. By this approach, the system can adapt to random activity time variation. A cluster tool derived as a not-always- schedulable system by the existing methods is shown always-schedulable by using the proposed innovative approach.

Original languageEnglish (US)
Title of host publication4th IEEE Conference on Automation Science and Engineering, CASE 2008
Pages109-114
Number of pages6
DOIs
StatePublished - Nov 3 2008
Event4th IEEE Conference on Automation Science and Engineering, CASE 2008 - Washington, DC, United States
Duration: Aug 23 2008Aug 26 2008

Publication series

Name4th IEEE Conference on Automation Science and Engineering, CASE 2008

Other

Other4th IEEE Conference on Automation Science and Engineering, CASE 2008
Country/TerritoryUnited States
CityWashington, DC
Period8/23/088/26/08

All Science Journal Classification (ASJC) codes

  • Control and Systems Engineering
  • Electrical and Electronic Engineering

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