Petri net modeling and scheduling of a close-down process for time-constrained single-arm cluster tools

Qinghua Zhu, Mengchu Zhou, Yan Qiao, Naiqi Wu

Research output: Contribution to journalArticlepeer-review

61 Scopus citations

Abstract

In wafer fabrication, a robotic cluster tool is required to be closed down in order for engineers to perform its on-demand and preventive maintenance and switch between different wafer lots. They often deal with a close-down process subject to wafer residency time constraints, i.e., a wafer must exit from a processing chamber before its quality degradation within a certain time limit. To obtain higher yield, it is very important to optimize a close-down process for a cluster tool. Yet the existing literature pays no or little attention to this issue. By focusing on a time-constrained single-arm cluster tool, this paper intends: 1) to build its Petri net model to analyze its schedulability and 2) to develop computationally efficient algorithms to find an optimal and feasible schedule for its closingdown process under different workloads at its steps. Industrial examples are used to illustrate the application of the proposed method.

Original languageEnglish (US)
Article number7572224
Pages (from-to)389-400
Number of pages12
JournalIEEE Transactions on Systems, Man, and Cybernetics: Systems
Volume48
Issue number3
DOIs
StatePublished - Mar 2018

All Science Journal Classification (ASJC) codes

  • Software
  • Control and Systems Engineering
  • Human-Computer Interaction
  • Computer Science Applications
  • Electrical and Electronic Engineering

Keywords

  • Cluster tool
  • Discrete event systems
  • Optimization
  • Petri net (PN)
  • Robotic systems
  • Scheduling
  • Wafer fabrication

Fingerprint Dive into the research topics of 'Petri net modeling and scheduling of a close-down process for time-constrained single-arm cluster tools'. Together they form a unique fingerprint.

Cite this