Petri net modeling and wafer sojourn time analysis of single-arm cluster tools with residency time constraints and activity time variation

Yan Qiao, Nai Qi Wu, Meng Chu Zhou

Research output: Contribution to journalArticlepeer-review

75 Scopus citations

Fingerprint

Dive into the research topics of 'Petri net modeling and wafer sojourn time analysis of single-arm cluster tools with residency time constraints and activity time variation'. Together they form a unique fingerprint.

Physics & Astronomy

Engineering & Materials Science

Chemical Compounds