Photolithographic patterning of porous silicon using silicon nitride and silicon carbide masks

Keyphrases

• Porous Silicon 100%
• Silicon Carbide 100%
• Silicon Nitride 100%
• Photolithography Patterning 100%
• Microcracks 66%
• Wafer 33%
• Silicon Carbide on Silicon 33%
• Anodic Etching 33%
• Photolithography Process 33%
• Selective Formation 33%
• Ambient Environment 33%
• HF Solution 33%

Material Science

• Silicon Carbide 100%
• Porous Silicon 100%
• Silicon Nitride 100%
• Film 33%
• Silicon 33%
• Anodizing 33%