Physical properties of diamond-like nanocomposite films

B. Dorfman, M. Abraizov, B. Pypkin, M. Strongin, X. Q. Yang, D. Yan, Fred H. Pollak, J. Grow, R. Levy

Research output: Contribution to journalConference articlepeer-review

5 Scopus citations

Abstract

Diamond-like nanocomposite (DLN) and metal containing DLN (Me-DLN) films, synthesized in a combined process of deposition of carbon-silicon precursor and magnetron sputtering of a metal target, have been examined by Auger electron spectroscopy, Raman and IR spectroscopy, nanoindentation and internal stress measurements. The stability of the films under ion and electron irradiation and thermal annealing has been tested.

Original languageEnglish (US)
Pages (from-to)43-48
Number of pages6
JournalMaterials Research Society Symposium - Proceedings
Volume351
DOIs
StatePublished - 1994
Externally publishedYes
EventProceedings of the 1994 MRS Symposium - San Francisco, CA, USA
Duration: Apr 4 1994Apr 8 1994

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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