Physical properties of diamond-like nanocomposite films

B. Dorfman; M. Abraizov; B. Pypkin; M. Strongin; X. Q. Yang; D. Yan; Fred H. Pollak; J. Grow; R. Levy

doi:10.1557/proc-351-43

Physical properties of diamond-like nanocomposite films

B. Dorfman, M. Abraizov, B. Pypkin, M. Strongin, X. Q. Yang, D. Yan, Fred H. Pollak, J. Grow, R. Levy

Research output: Contribution to journal › Conference article › peer-review

6 Scopus citations

Abstract

Diamond-like nanocomposite (DLN) and metal containing DLN (Me-DLN) films, synthesized in a combined process of deposition of carbon-silicon precursor and magnetron sputtering of a metal target, have been examined by Auger electron spectroscopy, Raman and IR spectroscopy, nanoindentation and internal stress measurements. The stability of the films under ion and electron irradiation and thermal annealing has been tested.

Original language	English (US)
Pages (from-to)	43-48
Number of pages	6
Journal	Materials Research Society Symposium - Proceedings
Volume	351
DOIs	https://doi.org/10.1557/proc-351-43
State	Published - 1994
Externally published	Yes
Event	Proceedings of the 1994 MRS Symposium - San Francisco, CA, USA Duration: Apr 4 1994 → Apr 8 1994

All Science Journal Classification (ASJC) codes

General Materials Science
Condensed Matter Physics
Mechanics of Materials
Mechanical Engineering

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title = "Physical properties of diamond-like nanocomposite films",

abstract = "Diamond-like nanocomposite (DLN) and metal containing DLN (Me-DLN) films, synthesized in a combined process of deposition of carbon-silicon precursor and magnetron sputtering of a metal target, have been examined by Auger electron spectroscopy, Raman and IR spectroscopy, nanoindentation and internal stress measurements. The stability of the films under ion and electron irradiation and thermal annealing has been tested.",

author = "B. Dorfman and M. Abraizov and B. Pypkin and M. Strongin and Yang, {X. Q.} and D. Yan and Pollak, {Fred H.} and J. Grow and R. Levy",

year = "1994",

doi = "10.1557/proc-351-43",

language = "English (US)",

volume = "351",

pages = "43--48",

journal = "Materials Research Society Symposium - Proceedings",

issn = "0272-9172",

publisher = "Materials Research Society",

note = "Proceedings of the 1994 MRS Symposium ; Conference date: 04-04-1994 Through 08-04-1994",

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TY - JOUR

T1 - Physical properties of diamond-like nanocomposite films

AU - Dorfman, B.

AU - Abraizov, M.

AU - Pypkin, B.

AU - Strongin, M.

AU - Yang, X. Q.

AU - Yan, D.

AU - Pollak, Fred H.

AU - Grow, J.

AU - Levy, R.

PY - 1994

Y1 - 1994

N2 - Diamond-like nanocomposite (DLN) and metal containing DLN (Me-DLN) films, synthesized in a combined process of deposition of carbon-silicon precursor and magnetron sputtering of a metal target, have been examined by Auger electron spectroscopy, Raman and IR spectroscopy, nanoindentation and internal stress measurements. The stability of the films under ion and electron irradiation and thermal annealing has been tested.

AB - Diamond-like nanocomposite (DLN) and metal containing DLN (Me-DLN) films, synthesized in a combined process of deposition of carbon-silicon precursor and magnetron sputtering of a metal target, have been examined by Auger electron spectroscopy, Raman and IR spectroscopy, nanoindentation and internal stress measurements. The stability of the films under ion and electron irradiation and thermal annealing has been tested.

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U2 - 10.1557/proc-351-43

DO - 10.1557/proc-351-43

M3 - Conference article

AN - SCOPUS:0028594403

SN - 0272-9172

VL - 351

SP - 43

EP - 48

JO - Materials Research Society Symposium - Proceedings

JF - Materials Research Society Symposium - Proceedings

T2 - Proceedings of the 1994 MRS Symposium

Y2 - 4 April 1994 through 8 April 1994

ER -

Physical properties of diamond-like nanocomposite films

Abstract

All Science Journal Classification (ASJC) codes

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