Plasma enhanced chemical vapor deposition of Si-N-C-H films from environmentally benign organosilanes

R. A. Levy, J. M. Grow, Y. Yu, K. T. Shih

Research output: Contribution to journalArticlepeer-review

3 Scopus citations

Fingerprint

Dive into the research topics of 'Plasma enhanced chemical vapor deposition of Si-N-C-H films from environmentally benign organosilanes'. Together they form a unique fingerprint.

Engineering & Materials Science

Physics & Astronomy

Chemical Compounds