Polycrystalline silicon films deposited in a glow discharge at temperatures below 250°C

Keyphrases

• Diffraction 100%
• Glow Discharge 100%
• Polycrystalline Silicon Films 100%
• Low Pressure 50%
• X-ray 50%
• Raman Scattering 50%
• Crystallite Size 50%
• Electron Diffraction 50%
• Deposition Rate 50%
• Hydrogen Plasma 50%
• Chemical Transport 50%
• Transmission Electron Microscopic 50%
• X-ray Transmission 50%
• Microscopic Data 50%

Physics

• Polycrystalline 100%
• Silicon Films 100%
• Glow Discharge 100%
• Thin Films 50%
• Raman Spectra 50%
• X Ray Diffraction 50%
• Crystallite 50%
• Hydrogen Plasma 50%
• Electron Diffraction 50%
• Transportation 50%
• Diffraction 50%

Material Science

• Film 100%
• Silicon 100%
• Thin Films 50%
• X-Ray Diffraction 50%
• Electron Diffraction 50%
• Crystallite Size 50%
• Hydrogen 50%