The process of chain branching in silane chlorination is shown to be pressure quenched (He, Cl2) which strongly testifies to the mechanism of chain branching via energy rich molecules. Comparison between experimental data on quenching of SiH4+Cl2 and SiD4+Cl2 reactions, and calculations by RRKM theory disagree with the previously proposed branching channel - dissociation of highly excited SiH3Cl molecules: SiH3Cl→SiHCl+H2. The rate constant of the reaction of chlorine atom with SiD4 is determined to be (1.8±0.3) × 10-10 cm3/s(±2σ) at T=298± 5 K.
|Original language||English (US)|
|Number of pages||8|
|State||Published - Jun 1 1990|
All Science Journal Classification (ASJC) codes
- Physics and Astronomy(all)
- Physical and Theoretical Chemistry