Process dependent optimization of dielectric and metal stacks for multilevel resistive random-access memory

Pengxiang Zhao, Durga Misra, Dina Triyoso, Vidya Kaushik, Kandabara Tapily, Robert D. Clark, Steven Consiglio, Cory S. Wajda, Gert J. Leusink

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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Engineering & Materials Science