Processing & characterization of thin films of Sio2 on Si for integrated circuits

  • N. M. Ravindra
  • , W. N. Carr
  • , O. L. Russo
  • , D. Fathy
  • , A. R. Heyd
  • , K. Vedam
  • , J. Narayan

Research output: Contribution to journal › Article › peer-review

3 Scopus citations

Fingerprint

Dive into the research topics of 'Processing & characterization of thin films of Sio2 on Si for integrated circuits'. Together they form a unique fingerprint.

Keyphrases

Engineering

Material Science