Progressive breakdown characteristics of high-K/metal gate stacks

G. Bersuker, N. Chowdhury, C. Young, D. Heh, Durgamadhab Misra, R. Choi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

43 Scopus citations

Fingerprint

Dive into the research topics of 'Progressive breakdown characteristics of high-K/metal gate stacks'. Together they form a unique fingerprint.

Engineering & Materials Science