Skip to main navigation Skip to search Skip to main content

Pulsed DC, Gas-Flow Hollow Cathode Discharge: A Source for Sputter-Deposition

  • C. Paduraru
  • , A. Belkind
  • , K. Becker
  • , J. Lopez
  • , A. Delahoy
  • , S. Y. Guo

Research output: Contribution to journal › Conference article › peer-review

3   Link opens in a new tab Scopus citations

Fingerprint

Dive into the research topics of 'Pulsed DC, Gas-Flow Hollow Cathode Discharge: A Source for Sputter-Deposition'. Together they form a unique fingerprint.
Sort by

Keyphrases

Chemistry

Material Science

Physics

Chemical Engineering