Keyphrases
Gas Flow
100%
Sputter Deposition
100%
Hollow Cathode Discharge
100%
Pulsed DC
100%
Pressure-driven Flow
33%
Cathode Material
33%
Reactive Gas
33%
Plasma-enhanced Chemical Vapor Deposition (PECVD)
33%
Gas Atmosphere
33%
Hollow Cathode
33%
Deposition by Sputtering
33%
Langmuir Probe Measurements
33%
Remote Plasma
33%
Surface Contamination
33%
Pulsed DC Power
33%
Low-temperature Plasma
33%
Cathode Activation
33%
Electrode Surface
33%
Sputtering Temperature
33%
Power Parameters
33%
Activation Time
33%
Rectangular Profile
33%
Optical Emission Spectroscopy
33%
DC Power
33%
Material Science
Cathode
100%
Sputter Deposition
100%
Gas Flow
100%
Cathode Material
20%
Emission Spectroscopy
20%
Plasma-Enhanced Chemical Vapor Deposition
20%
Engineering
Gas Flow
100%
Low-Temperature
33%
Chemical Vapor Deposition
33%
Vapor Deposition
33%
Surface Contamination
33%
Temperature Plasma
33%
Electrode Surface
33%
Generated Plasma
33%
Chemical Engineering
Plasma Enhanced Chemical Vapor Deposition
100%
Sputter Deposition
100%