Engineering & Materials Science
Sputter deposition
97%
Cathodes
59%
Flow of gases
57%
Plasmas
27%
Langmuir probes
27%
Optical emission spectroscopy
24%
Plasma enhanced chemical vapor deposition
21%
Cathode materials
21%
Sputtering
19%
Gases
17%
Contamination
14%
Chemical activation
13%
Copper
12%
Electrodes
11%
Temperature
5%
Physics & Astronomy
hollow cathodes
69%
gas flow
54%
direct current
46%
cathodes
32%
optical emission spectroscopy
22%
electrostatic probes
22%
cold plasmas
21%
gases
20%
contamination
17%
activation
15%
sputtering
15%
vapor deposition
15%
copper
14%
atmospheres
14%
electrodes
12%
profiles
10%
Chemical Compounds
Hollow Cathode Discharge
100%
Sputter Deposition
85%
Cathode
43%
Optical Emission Spectroscopy
25%
Plasma
24%
Sputtering
21%
Gas
21%
Probe
12%
Pressure
11%
Behavior as Electrode
9%
Surface
6%