Rapid thermal activation and diffusion of boron and phosphorus implants

A. T. Fiory, S. G. Chawda, S. Madishetty, V. R. Mehta, N. M. Ravindra, S. P. McCoy, M. E. Lefrançois, K. K. Bourdelle, J. M. McKinley, H. J.L. Gossmann, A. Agarwal

Research output: Contribution to conference › Paper › peer-review

5 Scopus citations

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Keyphrases

Engineering

Material Science

Immunology and Microbiology

Biochemistry, Genetics and Molecular Biology

Chemical Engineering