Reactive-environment hollow cathode sputtering: Compound film production, and application to thin film photovoltaics

Alan E. Delahoy, Sheyu Guo, John Cambridge, Rob Lyndall, J. A.Anna Selvan, Anamika Patel, Andrei Foustotchenko, Baosheng Sang

Research output: Chapter in Book/Report/Conference proceedingConference contribution

6 Scopus citations

Abstract

This paper reviews EPV's development of hardware and process technology to accomplish large area, high rate sputtering from metal targets in a reactive mode without target poisoning. The method is termed reactive-environment hollow cathode sputtering (RE-HCS) and makes use of the intense plasma confined in a hollow cathode. A linearly extended cathode is described, with one or more reactive gases delivered externally to the cathode. The basic operating characteristics of the cathode are described. The method is applied to the development of high performance transparent conducting oxides (TCOs) and other oxides and nitrides. The relevance of RE-HCS to the PV community is further demonstrated through the incorporation of TCOs and other materials produced by the method into thin film PV devices with competitive performance. Versions of the cathode suitable for large width industrial coating have been developed.

Original languageEnglish (US)
Title of host publicationConference Record of the 2006 IEEE 4th World Conference on Photovoltaic Energy Conversion, WCPEC-4
PublisherIEEE Computer Society
Pages327-332
Number of pages6
ISBN (Print)1424400163, 9781424400164
DOIs
StatePublished - Jan 1 2006
Event2006 IEEE 4th World Conference on Photovoltaic Energy Conversion, WCPEC-4 - Waikoloa, HI, United States
Duration: May 7 2006May 12 2006

Publication series

NameConference Record of the 2006 IEEE 4th World Conference on Photovoltaic Energy Conversion, WCPEC-4
Volume1

Other

Other2006 IEEE 4th World Conference on Photovoltaic Energy Conversion, WCPEC-4
CountryUnited States
CityWaikoloa, HI
Period5/7/065/12/06

All Science Journal Classification (ASJC) codes

  • Renewable Energy, Sustainability and the Environment
  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials
  • Materials Chemistry

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