Real-time deadlock-free scheduling for semiconductor track systems based on colored timed Petri nets

This paper addresses the problem of real-time deadlock-free scheduling for a semiconductor track system. The system is required to process wafers continuously, cassette by cassette. The process is not necessarily a repeated one. In addition, the system is deadlock-prone and its modules are failure-prone. Thus, real-time scheduling approaches are required to achieve high-performance. The problem can be solved in a hierarchical way. A deadlock avoidance policy is developed for the system as a lower-layer controller. With the support of the deadlock avoidance policy, heuristic rules are proposed to schedule the system in real-time. An effective modeling tool, colored-timed resource-oriented Petri net, is presented. It is shown that with this model we can schedule a system to achieve satisfactory results in real-time. This method is tolerant to module failures.