Real-time scheduling of single-arm cluster tools subject to residency time constraints and bounded activity time variation

Yan Qiao, Nai Qi Wu, Meng Chu Zhou

Research output: Contribution to journalArticlepeer-review

70 Scopus citations

Abstract

It is very challenging to schedule cluster tools subject to wafer residency time constraints and activity time variation. This work develops a Petri net model to describe the system and proposes a two-level real-time scheduling architecture. At the lower level, a real-time control policy is used to offset the activity time variation as much as possible. At the upper level, a periodical off-line schedule is derived under the normal condition. This work presents the schedulability conditions and scheduling algorithms for an off-line schedule. The schedulability conditions can be analytically checked. If they are satisfied, an off-line schedule can be analytically found. The off-line schedule together with a real-time control policy forms the real-time schedule for the system. It is optimal in terms of cycle time minimization. Illustrative examples are given to show the application of the proposed approach.

Original languageEnglish (US)
Article number6197243
Pages (from-to)564-577
Number of pages14
JournalIEEE Transactions on Automation Science and Engineering
Volume9
Issue number3
DOIs
StatePublished - 2012

All Science Journal Classification (ASJC) codes

  • Control and Systems Engineering
  • Electrical and Electronic Engineering

Keywords

  • Cluster tools
  • Petri net (PN)
  • discrete event system
  • scheduling
  • semiconductor manufacturing

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