Recent advances in semiconductor factory automation, Part 2: Equipment-level automation

Mu Der Jeng; Mengchu Zhou; Thomas Wen Yao Chen

doi:10.1109/MRA.2004.1337818

Recent advances in semiconductor factory automation, Part 2: Equipment-level automation

Mu Der Jeng, Mengchu Zhou, Thomas Wen Yao Chen

Electrical and Computer Engineering

Research output: Contribution to journal › Editorial › peer-review

Original language	English (US)
Pages (from-to)	4
Number of pages	1
Journal	IEEE Robotics and Automation Magazine
Volume	11
Issue number	3
DOIs	https://doi.org/10.1109/MRA.2004.1337818
State	Published - Sep 2004

All Science Journal Classification (ASJC) codes

Control and Systems Engineering
Computer Science Applications
Electrical and Electronic Engineering

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10.1109/MRA.2004.1337818

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title = "Recent advances in semiconductor factory automation, Part 2: Equipment-level automation",

author = "Jeng, \{Mu Der\} and Mengchu Zhou and Chen, \{Thomas Wen Yao\}",

year = "2004",

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journal = "IEEE Robotics and Automation Magazine",

issn = "1070-9932",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

number = "3",

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T1 - Recent advances in semiconductor factory automation, Part 2

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AU - Jeng, Mu Der

AU - Zhou, Mengchu

AU - Chen, Thomas Wen Yao

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SP - 4

JO - IEEE Robotics and Automation Magazine

JF - IEEE Robotics and Automation Magazine

IS - 3

ER -

Recent advances in semiconductor factory automation, Part 2: Equipment-level automation

All Science Journal Classification (ASJC) codes

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