Reduced 1/f noise and gm degradation for sub-0.25 μm MOSFETs with 25 angstroms-50 angstroms gate oxides grown on nitrogen implanted Si substrates

C. T. Liu, D. Misra, K. P. Cheung, G. B. Alers, C. P. Chang, J. I. Colonell, W. Y.C. Lai, C. S. Pai, R. Liu, J. T. Clemens

Research output: Contribution to conference › Paper › peer-review

4 Scopus citations

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Engineering

Material Science